Dr. Vadym Zayetsv.zayets(at)gmail.com |
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more Chapters on this topic:IntroductionTransport Eqs.Spin Proximity/ Spin InjectionSpin DetectionBoltzmann Eqs.Band currentScattering currentMean-free pathCurrent near InterfaceOrdinary Hall effectAnomalous Hall effect, AMR effectSpin-Orbit interactionSpin Hall effectNon-local Spin DetectionLandau -Lifshitz equationExchange interactionsp-d exchange interactionCoercive fieldPerpendicular magnetic anisotropy (PMA)Voltage- controlled magnetism (VCMA effect)All-metal transistorSpin-orbit torque (SO torque)What is a hole?spin polarizationCharge accumulationMgO-based MTJMagneto-opticsSpin vs Orbital momentWhat is the Spin?model comparisonQuestions & AnswersEB nanotechnologyReticle 11
more Chapters on this topic:IntroductionTransport Eqs.Spin Proximity/ Spin InjectionSpin DetectionBoltzmann Eqs.Band currentScattering currentMean-free pathCurrent near InterfaceOrdinary Hall effectAnomalous Hall effect, AMR effectSpin-Orbit interactionSpin Hall effectNon-local Spin DetectionLandau -Lifshitz equationExchange interactionsp-d exchange interactionCoercive fieldPerpendicular magnetic anisotropy (PMA)Voltage- controlled magnetism (VCMA effect)All-metal transistorSpin-orbit torque (SO torque)What is a hole?spin polarizationCharge accumulationMgO-based MTJMagneto-opticsSpin vs Orbital momentWhat is the Spin?model comparisonQuestions & AnswersEB nanotechnologyReticle 11
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Measurement of Magnetic and Magneto- transport properties of FeCoB nanomagnets
Spin and Charge TransportAbstract:Detailed measurement data (including all raw data ) of magnetic and magneto- transport properties of FeCoB nanomagnets are described. 3 new high- precision, high- reproducibility, high- repeatability measurements have been used. I have developed these methods in 2018-2020. The 1st method measures the dependence of the Hall angle on external magnetic field, which is applied along the magnetization of the nanomagnet. It allows a high- precision measurement of the Inverse Spin Hall effect (ISHE) and Anomalous Hall effect (AHE). Additionally it allows to evaluate different spin properties of the electron gas (e.g. the spin polarization). The 2nd method is the modified measurement of the anisotropy field Hani, where the in-plane component of magnetization is measured by scanning both in-plane and perpendicular- to- plane external magnetic field. Additionally the method measures the strength and features of perpendicular magnetic anisotropy (PMA) and current induced in-plane magnetic field, which is called "damp- like torque" and "field-like" torque. The 3nd method is a high- precision measurement of parameters of thermo- activated magnetization switching such as coercive field, retention time, size of nucleation domain and parameter delta.Exploring a very high precision of the developed measurement methods, the dependence of the magnetic parameters on gate voltage (the voltage- controlled magnetic anisotropy (VCMA) effect) and the current (spin- orbit torque (SOT) effect) was precisely measured and studied.Single-layer nanomagnet. Optical lithography only.nanomagnet size 3um x 3 um
click on wafer name to see more detailed data
Single-layer nanomagnet. Electron lithography.width of nanomagnet is 100 nm or 200 nm or 400 nm or 1000 nm or 2000 nmlength of nanomagnet is 50 nm or 100 nm or 200 nm or 400 nm or 1000 nm or 2000 nm
Multi-layer nanomagnet. .nanomagnet size 3um x 3 um
click on wafer name to see more detailed data
Contentclick on the chapter for the shortcut
(1) Raw Measurement Data of all nanomagnets() Measurement methods(method 1): Measurement of Anomalous Hall effect (AHE) and Inverse Spin Hall effect (ISHE)(method 2): Measurement of anisotropy field, strength of perpendicular magnetic anisotropy (PMA), " field- like torque" and "damp- like torque"(method 3): measurement of coercive field, retention time, size of nucleation domain and parameter delta.(2) Measurement of Voltage- Controlled Magnetic Anisotropy (VCMA effect)(3) Temperature dependence of magnetic parameters(4) Measurement of Spin- orbit torque (SOT effect)(5) Measurement in gate and gap regions.(6).Samples:(1) Volt 40A (Ret14) (Ta(2):FeB(1.3) Hanis =4.2 kG Hc =170 Oe-220 Oe(a) SOT (b) VCMA (2) Volt 50B (Ta(3)/ FeB(1.1) Hanis =5 kG Hc =170 Oe-220 Oe(a) SOT (b) VCMA (3) Volt 53B Ta(2.5 nm)/FeBCo(x=0.3, 1 nm) Hanis =2.2-6 kG Hc =200 Oe-330 Oe(a) SOT (b) VCMA (4) Volt54A (Ret14) Ta(2.5 nm)/ FeB(1.1 nm) Hanis =2.5 kG Hc =60 Oe(a) SOT (b) VCMA (5) Volt54B Ta(2.5 nm)/ FeB(1.1 nm) Hanis =2 kG Hc =20 Oe(a) SOT (b) VCMA (6) Volt 55 Ta(5 nm)/ FeB(0.9 nm) Hanis =4 -11 kG Hc =150 Oe-225 Oe; (few: 400 Oe,90 Oe)(a) SOT (b) VCMA (7) Volt 57A (Ret14): Ta(5 nm)/ FeCoB( x=0.5 1.1 nm) Hanis =4.8 kG Hc =200 Oe-330 Oe(a) SOT (b) VCMA (8) Volt 57B (Ret14): Ta(5 nm)/ FeCoB( x=0.5 1.1 nm) Hanis =5 kG Hc =620 Oe-740 Oe(a) SOT (b) VCMA (9) Volt 58A (Ret14): Ta(5 nm)/ (FeCo 1 nm, x=0.3) Hanis =6.5-8.5 kG Hc =200 Oe-330 Oe(a) SOT (b) VCMA (10) Volt 59A (Ret14): Ta(8 nm)/ FeB(0.9 nm) Hanis =8- 11 kG Hc =280 Oe-550 Oe(a) SOT (b) VCMA (11) Volt59B: Ta(8 nm)/ FeB(0.9 nm) Hanis =6 -9 kG Hc =220 Oe-290 Oe(a) SOT (b) VCMA (12) Volt 39A Ta(2):FeB(0.8):Ta(0.5):FeB(0.8):MgO(5): Ta(1): Ru(5)(13) Volt 48A [FeB(0.45)/W(0.2)]7 FeB(0.45) MgO(6.5)/W(1)/Ru(5)(11) Questions & Answers......... Measurement Data of all nanomagnets
newest: June 2022 nanomagnet2022.06.12.zip old January 2022 nanomagnet2022.01.10.zip July 2021 2021.07.01.zip April 2021 data nanomagnet 2021.03.zip Data of All nanomagnetsPMA & strength of the spin-orbit interactionclick on image to enlarge it
Measurement methodsAll measurement method have been developed by me in 2018-2020. The features of all methods are a high- repeatability, high-reproducibility and very high measurement precision. I do my best to avoid and eliminate any possible systematical error.(high repeatability, high reproducibility)I have checked re measured some random samples after ~one year after their first measurement. All measurements gave exactly same results with the measurement precision. (high measurement precision)I have achieved a very high measurement precision for all my methods. E.g. I can measure the coercive field with precision of 0.1 Oe (See here) , which is very hard to achieve by any other known measurement methods. I am constantly improving my measurement setup in order to reduce measurement noise and therefore to improve the measurement precision. (free of a systematic error)To avoid a systematical error is the major challenge for any high- precision measurement method. In order to avoid a systematical error, I time- to time verify a measurement by several independent measurement method. Achievement of the same value of the parameter measured by independent methods is a good indication that there is no systematical error.
The method 1 is very difficult to use (or even impossible to use) for a larger- size nanomagnet or a continuous film due to their domain structure.
Is it possible to detect the existence of the static domains from this measurements?A. Yes. (indication 1 for existence of static domains): there are sharp peaks for 1st and 2nd derivatives (indication 2 for existence of static domains): the fitting is impossible (indication 3 for existence of static domains): red,green, blue and light- blue lines of Fig.11 do not coincide
(note) There is an ambiguity of the fitting αHall and its 1st and 2nd derivatives (See here), when exactly the same fitting can be obtained at different sets ( αAHE, αISHE , sp), where αAHE is the magnitude of Anomalous Hall effect (AHE), αISHE is the magnitude of Inverse Spin Hall effect (ISHE) and sp is the spin polarization of the electron gas.
(note) Often the difference of the αHall between different nanomagnets of the same sample is a constant offset of αHall without a change (or with a very small change) of its 1st and 2nd derivatives (E.g. sample Volt54). It indicates that there is a difference of magnitude of AHE between samples, but the variation of the ISHE and spin polarization sp of the electron gas is weak from a nanomagnet to nanomagnet . (note 2): There are sample where it is not the case (See details of each sample)
(note) There is an ambiguity of the fitting αHall and its 1st and 2nd derivatives (See here), when exactly the same fitting can be obtained at different sets ( αAHE, αISHE , sp), where αAHE is the magnitude of Anomalous Hall effect (AHE), αISHE is the magnitude of Inverse Spin Hall effect (ISHE) and sp is the spin polarization of the electron gas.
(note): For the most of sample (E.g. Sample Volt 54B free 28), a different gate voltage or bias current makes a constant change of αHall without a change (or with a very small change) of 1st and 2nd derivatives. It indicates that the gate voltage or bias current mainly influence the AHE and only weakly influence the ISHE and spin polarization sp of the electron gas. (note 2): There are sample where it is not the case (See details of each sample)
Due to the an ambiguity of the fitting αHall (See here), it is difficult to calculate the absolute values of the magnitude αAHE of Anomalous Hall effect (AHE), the magnitude αISHE of Inverse Spin Hall effect (ISHE) and the spin polarization sp of the electron gas. However, it is possible to measure their relative changes under a different gate voltage or bias current or a changes from sample to sample
Figure 31 shows measured data of sample, in which both αHall and its 1st derivative change for a different bias current. The measured data are shown at right side of figure. It is clear that current dependences for αHall and its 1st derivative are different and independent.
(note) the current dependence of the 2nd derivative (not shown) is similar to the current dependence of the 1st derivative It can be assumed that the bias current only affects αAHE and αISHE other parameters, which may influence αHall , remain unchanged. (step 1). Since αAHE is a constant vs H, the 1st derivative (and 2nd derivative) is proportional to αISHE and is not influenced by αAHE. Lines of left- bottom graph are clearly parallel and their difference is a constant. Adding a constant to 1st derivative, it is possible to fit all lines, which corresponds to 1st derivative at a different current, to one single line (See bottom right graph). It gives the difference of magnitude ΔαISHE of ISHE at a different currents (step 2) After correction of αHall for , the lines in top- left graphs becomes parallel and and their difference becomes a constant. Adding corresponded constant to each line, it is possible to fit all lines to one single line (See top- right graph). It gives the difference of magnitude ΔαAHE of AHE at different currents
(method 2): Measurement of anisotropy field, strength of perpendicular magnetic anisotropy (PMA), " field- like torque" and "damp- like torque"
(main idea): In-plane component of magnetization M|| is measured under an in-plane external magnetic field H||. In absence of the magnetization M is perpendicular to the plane. Under H|| the M turns towards H|| until its direction is fully in-plane. The stronger the PMA is, the large H|| is required to turn M fully in- plane.
(How does it work)An external magnetic field (in- plane field H||) i applied perpendicularly to the stable magnetization (easy axis) of the nanomagnet (perpendicular- to plane). Even though the magnetization is turning towards and away from its the equilibrium direction (easy axis), it resists against the turning. Method 3 measures the strength of this resistance and therefore the magnetic energy, which contains in the nanomagnet. An. additional magnetic field Hz is applied to enhance the resistance against the turning and therefore it more clarifies the magnetic features of the nanomagnet.
(Which parameters are measured) Two parameters are measured: (parameter 1) Angle of line M|| vs H||, which gives the anisotropy field Hani The Haniis the field at which the line crosses the x-axis and therefore the magnetization is aligned fully in- plane. (parameter 2). The offset magnetic field Hoff, . The Hoff is the magnetic field, for which the line is shifted from the axis origin.
(What is new in the proposed measuremengt method) Two (old measurement method): in-plane magnetization M|| is measured under scan of H|| without any perpendicular field Hz (new proposed measurement method): in-plane magnetization M|| is measured under scan of H|| at a different perpendicular field Hz
(fact 1) There is in- plane magnetic field in ferromagnetic nanomagnet, which induced by PMA effect at boundaries of the nanomagnet. (fact 2) The magnitude and direction in- plane magnetic field Hoff increases and changes direction when an external magnetic field Hz is applied perpendicularly- to- plane of the nanomagnet fact 3) The magnitude and direction of in- plane magnetic field Hoff are different for opposite polarities of the external magnetic field Hz It indicates
Can the offset magnetic field Hoff be created due to a possible misalignment of the measured sample with respect to the magnet? Misalignment of perpendicular magnetic field Hz of only 0.5 deg from the film normal will induce in- plane field H|| of 10 G at Hz=7 kG?A. I have calibrated magnet with precision about 0.1 Oe by measuring the Hall effect in non-magnetic metal Ru (See below).
Destinguishing the type of magnetic fieldA magnetic field creates a torque on magnetic torque (type 1 of magnetic field) "Field - like torque"
verification of required measurement precision. Click here to expand.
Verification of required measurement precision
Content
(method 3): measurement of coercive field, retention time, size of nucleation domain and parameter delta
(main idea): All parameters of for thermo- activated switching such as coercive field, retention time, size of nucleation domain and parameter delta are measured by measuring an average switching time between two magnetization directions
Why this method has the highest repeatability, reproducibility and precision for the measurement of the magnetization switching parameters? What are the problems of the alternative methods?There are two reasons why other measurement methods a suffer from systematical errors.. The reason one is that the main parameter of the magnetization switching is the time interval, after which the magnetization is switched. Therefore, it is very important the time of any measurement should not influence the magnetization switching. E.g. the measurement time should substantially shorter than the the magnetization switching time. The second reason of a systematical error is the statistical nature of the magnetization switching. The
How it is possible to measure the retention time of several billion years?The retention time is the magnetization switching time without any external magnetic field and it can be very long. However, under external magnetic field the switching time exponentially decreases with magnitude of the field. The measurements are done under external magnetic field, at which the measurement of the magnetization switching time is convenient.
Calculation Example 1 (left graph) Volt54A Ta(2.5 nm):FeB(1.1 nm) Linear fit: 4.43-0.14·H coercive field Hc=4.43/0.14=31.6 G size of nucleation domain=sqrt(51717·0.14/1.4/1.1)=68.5 nm retention time τret=104.43sec=7.4 hours parameter Δ =0.5· 0.14·2.5·1000=174 M=1.4 T; Hani=2.5 kG; FeB thickness=1.1 nm; nanomagnet size: 3 μm x 3 μm
Calculation Example 2 (center graph) Volt59A L68 Ta(8 nm):FeB(0.9 nm) (device:L35) Linear fit: 26.224-0.07·H coercive field Hc=26.224/0.07=367.8 G size of nucleation domain=sqrt(51717·0.07/1.4/0.9)=54.1 nm retention time τret=1026.2 sec=3 109 billion years parameter Δ =0.5· 0.07·7.5·1000=267 M=1.4 T; Hani=7.5 kG; FeB thickness=0.9 nm; nanomagnet size: 3 μm x 3 μm
Calculation Example 3 (right graph) Volt40 Ta(2 nm):FeB(1.3 nm) (device:R71) Linear fit: 22.5-0.07·H coercive field Hc=22.5/0.07=324 G size of nucleation domain=sqrt(51717·0.07/1.4/1.3)=44.4 nm retention time τret=1022.5sec=1015 years=1,000,000 billion years parameter Δ =0.5·0.07·4.4·1000=152 M=1.4 T; Hani=4.4 kG; FeB thickness=1.3 nm; nanomagnet size: 3 μm x 3 μm
(interesting fact) A slight change of nanomagnet structure or nanomagnet fabrication conditions can change the retention time from a hour to many many billions years (compare Volt54A with Volt40 and Volt59A)
Samples Volt59A, Volt40 and Volt54A are very similar. Why their magnetic properties are very different?Reason 1 (minor): thickness of FeB FeB of Volt59A is slightly thicker than FeB of Volt54A . As a result, the contribution of the bulk of FeB becomes larger and the film becomes softer. (note) the bulk of FeB forces the magnetization M into in- plane direction, the interface of FeB forces M into the perpendicular- to- plane direction. As a result, the PMA energy is large in thinner FeB film than in a thicker film.Reason 2 (major): roughness of FeB interface The Ta layer is substantially thicker in Volt59A than in Volt54A . The thicker Ta layer makes smoother the FeB interface and therefore enhances the PMA (note) PMA in FeB is induced by its interface. The PMA is larger when the FeB interface is smoother. The PMA is weaker when the FeB interface is rougher.Reason 1 ;+ Reason 2 leads to the difference in PMA energy between samples. The PMA energy of Volt59A (Hani=7.5 kG) is 1.7 times large than that of Volt40 (Hani=4.4 kG) and 3 times larger that of Volt54A (Hani=2.5 kG) Reason 3 (major): unknown origin ????? The huge difference in retention time between Volt54A ( τret=7.4 hours) and Volt40 (τret=1015 years), Volt59A (τret=3 1018 years) cannot be explained by 1.8/3 times difference in the PMA energy. Mechanism which makes such a huge difference in τret between Volt54A and Volt40 is still a puzzle
Measurement of Voltage- Controlled Magnetic Anisotropy (VCMA effect)
(main idea): Dependence of magnetic parameters of a nanomagnet on magnitude of current j is measured. Since the gate voltage does not cause any electrical current, there is no influence of heating for this measurement.
All samples show the same dependence on the gate voltage. All magnetic parameters increased
Temperature dependence of magnetic parameters(main idea): Dependence of magnetic parameters of a nanomagnet on magnitude of current j is measured. The heating and therefore the sample temperature is proportional to current square j2.
Measurement of Spin- orbit torque (SOT effect)
(main idea): Dependence of magnetic parameters of a nanomagnet on polarity of current j is measured. In order to avoid the influence of heating due to the current, the same magnetic parameters is measured for two opposite currents. The difference of measured parameters ids due to the SOT effect.
Measurement in gate and gap regions
(note) Thickness of ferromagnetic FeB layer is only 1 nm. It is hard to stop at a precise designed etched thickness. (note) Etched materials were monitored during etching. Sensitivity of monitoring of Mg is high. Sensitivity of monitoring of Si,Fe,B,O2 is very low, because of chamber contamination by these elements. Sensitivity of monitoring of Ta is moderate/ low. (note) It is critically important to monitor that Ta layer is not etched out.
Your pictures show that you are making electrical contact to Ta layer. Is it important?It is much better to make the contact to FeB layer rather than to Ta layer. However, sometimes it is difficult (but possible) to stop inside FeB layer. The reason why it is better to stop etching inside FeB is following. After the etching the hole for the contact and before the deposition of top Au contact the sample are exposed to air. As a result, its top surface is slightly oxidized making unwanted tunnel barrier for contact significantly increasing the contact resistance. If this unwanted tunnel barrier is thin and it is broken during measurement (e.g. under 1 V). On FeB the oxide is very thin and it has almost no influence on the contact resistance. The oxide on Ta is strong, hard to break and it has a substantial resistance. The worse case is the oxide on tungsten (W). It is very strong and highly resistant. In all most- recent samples I can reliably stop etching for the contact inside FeB layer
Samples
Volt 40A (Ret14) (Ta(2):FeB(1.3):MgO(5.1)/Ta(1)/Ru(5) )All data is here
Conductivity: 0.023-0.029 S/m2 Anisotropy field Hanis =4.2 kGauss Coercive field = 170 Oe-220 Oe; Hall angle measured=290- 390 deg Intrinsic Hall angle of FeB= 736- 990 mdeg; Gap region etched: FeB is fully etched, stopped at FeB/ Ta interface ample:( R21 gate) αISHE,0.5= 222 mdeg; αAHE,0.5= 753 mdeg; αOHE=0.2 mdeg/kG; Hp=13.6 kG; range of Hp: 9.7 kG -21.6 mean Hp: 14.78 kG
magnetization- switching parameters: retention time τret : 1021 s size of nucleation domain: 40 nm; coercive field Hc: 310 Oe parameter Δ : 120
(Volt 40) Spin- orbit torque
(Volt 40) Voltage controlled magnetic anisotropy (VCMA)
Volt 50B (Ta(3)/ FeB(1.1)/ MgO(7)/ W(1)/ Ru(5))All data is here
Conductivity: 0.039-0.62 S/m2 Anisotropy field Hanis =5kGauss Coercive field = 170 Oe-220 Oe; Hall angle measured=450- 800 deg Intrinsic Hall angle of FeB= ; Gap region etched: stopped at MgO/ FeB interface sample:( free36 gate) αISHE,0.5= 213 mdeg; αAHE,0.5= 1777 mdeg; αOHE=0.2 mdeg/kG; Hp=9.72 kG;
magnetization- switching parameters: retention time τret : 1014 s size of nucleation domain: 45 nm; coercive field Hc: 200 Oe parameter Δ : 150
(Volt 50B) Spin- orbit torque
Volt 53B Ta(2.5 nm)/FeBCo(x=0.3, 1 nm) / MgO(7 nm)/ Ta(1nm)/ Ru(5 nm))All data is here
Conductivity: 0.04-0.06 S/m2 Anisotropy field Hanis =2.2 kGauss-6 kGauss Coercive field = 200 Oe-330 Oe; Hall angle measured αHall, measured =290- 750 mdeg Intrinsic Hall angle of FeB αHall, FeB= 1015 - 2625 mdeg; Gap region etched: FeB is partially etched, stopped in middle of FeCoB
sample:( ud66) αISHE,0.5= 274 mdeg; αAHE,0.5=2324 mdeg; αOHE=0.2 mdeg/kG; Hp=5.84 kG;
(Volt 53B) Spin- orbit torque
(Volt 53B) Voltage controlled magnetic anisotropy (VCMA)
Volt54A (Ret14) Ta(2.5 nm)/ FeB(1.1 nm)/ MgO(6 nm)/ Ta(1 nm)/ Ru(5 nm)All data is here
Conductivity: 0.055-0.06 S/m2 Anisotropy field Hanis =2.5 kGauss Coercive field = 20 Oe-70 Oe; Hall angle measured αHall, measured =320- 370 mdeg Intrinsic Hall angle of FeB αHall, FeB= 1047 - 1211 mdeg; Gap region etched: FeB is partially etched, stopped in middle of FeB
sample:( L70) αISHE,0.5= 351 mdeg; αAHE,0.5= 695 mdeg; αOHE=0.2 mdeg/kG; Hp=5.84 kG;
(Volt 54A) Spin- orbit torque
(Volt 54B) Voltage controlled magnetic anisotropy (VCMA)
Volt54B Ta(2.5 nm)/ FeB(1.1 nm)/ MgO(6 nm)/ Ta(1 nm)/ Ru(5 nm)All data is here
Conductivity: 0.037-0.06 S/m2 Anisotropy field Hanis =2 kGauss Coercive field = 5 Oe-50 Oe; Hall angle measured αHall, measured =350-400 mdeg Intrinsic Hall angle of FeB αHall, FeB= 1145 - 1309 mdeg; Gap region etched: FeB is partially etched, stopped in middle of FeB
sample:( free28 gate) αISHE,0.5= 551 mdeg; αAHE,0.5= 675 mdeg; αOHE=0.2 mdeg/kG; Hp=3.954 kG;
(Volt 54B) Spin- orbit torque
(Volt 54B) Voltage controlled magnetic anisotropy (VCMA)
Volt 55 Ta(5 nm)/ FeB(0.9 nm)/ MgO(6 nm)/ Ta(1 nm)/ Ru(5 nm)All data is here
Conductivity: 0.028-0.038 S/m2 Anisotropy field Hanis =4 kGauss-11 kGauss Coercive field = 150 Oe-225 Oe; (a few: 400 Oe,90 Oe) Hall angle measured αHall, measured =200- 650 mdeg Intrinsic Hall angle of FeB αHall, FeB= 1311 - 4261 mdeg;; Gap region etched: FeB is fully (partiality) etched, stopped at Ta/FeB interface (in middle of FeCoB)
sample:(ud40) αISHE,0.5= 323.8 mdeg; αAHE,0.5= 1141 mdeg; αOHE=0.2 mdeg/kG; Hp=7.25 kG;
(Volt 55) Spin- orbit torque
(Volt 55) Voltage controlled magnetic anisotropy (VCMA)
Volt 57A (Ret14): Ta(5 nm)/ FeCoB( x=0.5 1.1 nm)/ MgO(7 nm)/ Ta(1 nm)/ Ru(5 nm)All data is here
Conductivity: 0.044-0.055 S/m2 Anisotropy field Hanis =4.8 kGauss Coercive field = 200 Oe-330 Oe; Hall angle measured αHall, measured =175- 235 mdeg Intrinsic Hall angle of FeB αHall, FeB= 970- 1303 mdeg; Gap region etched: FeB is fully etched, stopped at Ta/FeCoB interface
sample:( L66) αISHE,0.5= 241 mdeg; αAHE,0.5= 930 mdeg; αOHE=0.2 mdeg/kG; Hp=5.5 kG;
(Volt 57A) Spin- orbit torque
(Volt 57A) Voltage controlled magnetic anisotropy (VCMA)
Volt 57B (Ret14): Ta(5 nm)/ FeCoB( x=0.5 1.1 nm)/ MgO(7 nm)/ Ta(1 nm)/ Ru(5 nm)All data is here
Conductivity: 0.02-0.027 S/m2 Anisotropy field Hanis =5 kGauss Coercive field = 620 Oe-740 Oe; Hall angle measured αHall, measured =110- 150 deg Intrinsic Hall angle of FeB αHall, FeB= 610- 831 mdeg;; Gap region etched: FeB is partially etched, stopped in middle of FeCoB
sample:( L20) αISHE,0.5= 65 mdeg; αAHE,0.5= 594 mdeg; αOHE=0.2 mdeg/kG; Hp=8.9 kG;
(Volt 57B) Spin- orbit torque
(Volt 57B) Voltage controlled magnetic anisotropy (VCMA)
Volt 58A (Ret14): Ta(5 nm)/ (FeCo 1 nm, x=0.3)/ MgO(7 nm)/ Ta(1 nm)/ Ru(5 nm)All data is here
Conductivity: 0.048-0.051 S/m2 Anisotropy field Hanis =6.5 kGauss-8.5 kGauss Coercive field = 200 Oe-330 Oe; Hall angle measured αHall, measured =360- 470 mdeg Intrinsic Hall angle of FeB αHall, FeB=2160- 2820 mdeg; Gap region etched: FeCoB is partially etched, stopped in middle of FeCoB sample:( R41 gate) αISHE,0.5= 377 mdeg; αAHE,0.5= 1497 mdeg; αOHE=0.2 mdeg/kG; Hp=8.8 kG;
(Volt 58A) Spin- orbit torque
(Volt 58A) Voltage controlled magnetic anisotropy (VCMA)
Volt 59A (Ret14): Ta(8 nm)/ FeB(0.9 nm)/ MgO(7.1 nm)/ Ta(1 nm)/ Ru(5 nm)All data is here
Conductivity: 0.048-0.052 S/m2 Anisotropy field Hanis =8 kGauss-11 kGauss Coercive field = 280 Oe-550 Oe; Hall angle measured αHall, measured =125- 145 mdeg Intrinsic Hall angle of FeB αHall, FeB= 1236 -1434 mdeg; Gap region etched: FeB is partially etched, stopped in middle of FeCoB sample:( L19) αISHE,0.5= 270.3 mdeg; αAHE,0.5= 1110 mdeg; αOHE=0.2 mdeg/kG; Hp=8.95 kG;
(Volt 59A) Spin- orbit torque
(Volt 59A) Voltage controlled magnetic anisotropy (VCMA)
Volt59B: Ta(8 nm)/ FeB(0.9 nm)/ MgO(7.1 nm)/ Ta(1 nm)/ Ru(5 nm)All data is here
Conductivity: 0.02-0.054 S/m2 Anisotropy field Hanis =6 kGauss-9 kGauss Coercive field = 220 Oe-290 Oe; Hall angle measured αHall, measured =120- 240 mdeg Intrinsic Hall angle of FeB αHall, FeB= 1186- 2373 mdeg;; Gap region etched: FeB is not etched, stopped at MgO/FeB interface
sample:( free71gate) αISHE,0.5= 141.25 mdeg; αAHE,0.5= 1636.1 mdeg; αOHE=0.2 mdeg/kG; Hp=10.46 kG;
(Volt 59B) Spin- orbit torque
(Volt 59B) Voltage controlled magnetic anisotropy (VCMA)
no data
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