Reticle: SpinTransport 11

Technology

Abstract:

It is for measearing basic properties of metal film. Resistance, contact resistance, Hall angle, capacitance,

3 termianal magnetization reversal

resist:

All fields were designed for positive resist + lift-off.

Usage of negative resist + Ar milling is also possible.

Technology flow

Example 1 (basic, no EB)

capacitors, MTJ, spin transistor, Hall bars, resistance, Spin Hall torque

starting film: Si:SiO2:FeGa(10 nm):MgO(1 nm):FeB (10nm) (the structure is oversimplified)

Step 1.

Field 3 (Hall Bars) -> Ar etching till SiO2 -> SiO2 sputtering (25 nm) (planarization+protection from oxidation) -> lift-off

Step 2.

Field 5 (Voltage electrodes) -> Ar etching (till middle of MgO or tillFeGa )-> SiO2 sputtering (40 nm) -> lift-off

Step 3.

Field 4 (contacts) -> Ar etching ( till FeGa (through 40 nm of SiO2 + or remaining MgO))-> sputtering (Cr (5 nm) + Au 70 nm) -> lift-off

Step 4.

Field 2 (top electrodes) ->-> sputtering (Cr (5 nm) + Au 200 nm) -> lift-off

Example 2 (simple & quick)

only Hall bars, resistance, contact resistance

starting film: Si:SiO2:FeGa(10 nm):MgO(1 nm):FeB (10nm) (oversimplified)

Step 1.

Field 3 (Hall Bars) -> Ar etching till SiO2 -> SiO2 sputtering (25 nm) (planarization+protection from oxidation) -> lift-off

Step 2.

Field 2 (top electrodes) ->-> sputtering (Cr (5 nm) + Au 200 nm) -> lift-off

All fields

download gds file of all fields:AllFields.gds

download zip file of all fields for Lazi:Reticle 11 lazi.zip

I recomend the use Lasi to check and design a reticle. It is very simple and powerful software. It is also free software. Download it here

How to use Lasi. Simple tips. Click here to expand.

How to use Lasi

1. Download Lazi software from here. Install it in some directory (for example C:\Lasi7)

2. Unzip reticle in some directory (for example C:\reticles\reticle11\)

3. Right click the shortcut 1 field marks. In "taget" input your Lazi directory (for example C:\Lasi\lazi.exe). In "start in" input name of field 1 folder (for example "C:\reticles\reticle11\ 1 field marks")

4. left click on this shortcut. Lasi will open field 1.

5. Choose cell your want to see by pushing "load" or "list"

6. You can use fit (to see all cell) or zoom functions

How to make your first reticle

1) make folder with name of your field and shortcut

2) push load and input new name of your cell. For example, "waveguide". If it is simplest cell use rank 1.

3) Choose your layer (if you do not have, create one in Cnfg (Menu 2)).

4) choose your object. For rank 1 you have two options: Box or Poly/Path.

5) For example choose Box.

6) In cmd type add 20,1,-20, -1 and you have waveguide

Next you can have waveguide with plasmon

7) Push "load". Name new layer "Plasmons". Use rank 2

8) Push Obj, choose "waveguide" (in a cell of rank 2, you can use all cells of rank 1)

9) Cmd, add 0,0. add 0, -5. And you have two waveguides

10) In Layer, choose another layer, which will be transperent.

11) Push Obj, choose Box. Push Cmd, add -1,1,1,-1. And you have a cut in one waveguide

Content

eb marks are included

Field 4 Contacts

download gds file: Field4.gds

Field 5 Voltage electrodes

download gds file: Field5.gds

Devices

Hall bars

Click on image to enlarge it.


800-nm-wide covered by SiO2	not covered by SiO2	long	wide

with big contacts

Modulated Iterface Anisotropy


big contact	A32	A33

additional side-modulation	line	only side-modulation

Electrical control of iterface anisotropy

MTJ

Dr. Vadym Zayets

v.zayets(at)gmail.com

more Chapters on this topic: