Dr. Vadym Zayetsv.zayets(at)gmail.com |
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Sample: aSi1:Al
aSi strip waveguide + Al:Au:plasmonic(wavelength=1550 nm)Plasmonic waveguide fabricated first, only stepper was used
Fabrication technology.PCVD of aSi : Nov. 2012 (Thank you to Matsui-san)
Plasmonic waveguide 2012 12 06
etch (without SiO2 removal at beginning) rec. 14 41+9+2+3 (3 times) 41(02 1 Pa 100/0 W)+9 (2 min wait)+2+3 (1 Pa ) Al (2' 50 W 6 nm) : Au (100 W 8' 118 nm) Au 400 nm +Cr 10 nm lift off 30 n7 Purpose of the Cr on top is to avoid plasmons at Au/SiO2 interface
thicknesses SEM checked top SiO2=85 nm; aSi=270 nm; thermo SiO2=1 um
Waveguide technology 2012 12 18
Pr. N 14 90+9+(2+3+41+9)(3 times) 90: 100W 5 Pa 20” CHF3 2: 80 W 5 Pa 20” SF6: CHF3 (9:0.5) 3; 80/20 W 5 Pa 35” SF6: CHF3 (5:0.5) 9: wait 2’ 41: 1 Pa 80/20 W 20 “ O2: CHF3(2:5)
Measurements
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I will try to answer your questions as soon as possible