SOI103 plasmonic Research V.Zayets

Sample: SOI 103

Si waveguide integrated with Fe/MgO plasmonic waveguide(wavelength=1550 nm)

Si waveguide were fabricated first, only stepper was used. Single-dielectric.

Fabrication technology.

Use SOI (220 nm) wafer

Si waveguide

AZ pos+ PL + ICP_RIE etch

Plasmonic waveguide

Double+PL++ 3d floor MBE

SOI 103 45 nm Fe 30 nm Au

+ sput

Au 400 nm (100 W 26') + Cr(100 nm) 200 W 10'

lift of n7 34

cross-sectional SEM of plasmonic waveguide. 2013 05 23.

Waveguide technology

cross-sectional SEM of Si waveguide.

Monolithical Integration

Top SEM and optical microscope top view of integration. SEM on 2013 05 17

Integration of plasmonic and dielectric waveguide. The SEM images taken across the dielectric and plasmonic waveguides are in the same scale and aligned. The positions, where light is propagates, are shown.

Measurements

TM mode. Fiber-to-fiber transmission as function of wavelength.

TE mode. Fiber-to-fiber transmission as function of wavelength. Oscillations: 0.66 nm

Dr. Vadym Zayets

v.zayets(at)gmail.com

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Introduction

AlGaAs waveguide (800 nm)

Si waveguide integrated with Fe/MgO plasmonic waveguide(wavelength=1550 nm)

Si waveguide were fabricated first, only stepper was used. Single-dielectric.

Fabrication technology.

Monolithical Integration

Measurements

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