Dr. Vadym Zayets

AlGaAs waveguide were fabricated first, only stepper was used. Double-dielectric. Thin MgO.

 

Fabrication technology.

MBE growth on 2013 on double holder with . AlGaAs core. SEM film thickness .

AlGaAs waveguide

AZ pos+ PL + 5 min wet etch

Dec tac etched step nm

Plasmonic waveguide

Double+PL++ 3d floor MBE

 

 

No Cross-sectional SEM (over polished )

 

 

 

 

I

Waveguide technology

 

 

 

Monolithical Integration

 

 

 

 

 

 

 

 

Measurements

TM mode. Fiber-to-fiber transmission as function of wavelength. Oscillations: 3.07 nm	TE mode. Fiber-to-fiber transmission as function of wavelength.

 

 

 

 

 

 

 

 

 

 

 

 

 

TM 0.394 nm
TE 0.36 nm loner plasmons OK

TM
7 um maybe biger with 4.2 nm

6 um clear TM osccilations with length 4 nm

7 um shorter plasmon
6 um longer plasmon

oscillation magnitude
1540 7 um TM 1.5 dB TE 3 dB
6 um TE 1.25 dB
loss average
1540 7 um TM 18.5 dB TE 15 dB
6 um TM 22.5 dB(+4 dB) TE 17.6 dB (+2.6 dB)

big oscilations of TM mode
7 um 1 dB
6 um 2-5 dB