D64 plasmonic Research V.Zayets

Sample: D64

AlGaAs waveguide integrated with Fe/MgO plasmonic waveguide(wavelength=1550 nm)

AlGaAs waveguide were fabricated first, only stepper was used. Double-dielectric. Thin MgO.

Fabrication technology.

MBE growth on 2013 on double holder with . AlGaAs core. SEM film thickness .

AlGaAs waveguide

AZ pos+ PL + 5 min wet etch

Dec tac etched step 520 nm

Plasmonic waveguide

Double+PL++ 3d floor MBE

D64(2'+6' etched) MgO(17 nm):Fe 45 nm: Au (30 nm)

Au 400 nm (100 W 26') + Cr(100 nm) 200 W 10'

lift off n7 34

Cross-sectional SEM on 2013 05 23

cross-sectional SEM of plasmonic waveguide. 2013 05 23.

cross-sectional SEM of AlGAAs waveguide. 201305 23

Waveguide technology

Monolithical Integration

Top SEM and optical microscope top view of integration

Integration of plasmonic and dielectric waveguide. The SEM images taken across the dielectric and plasmonic waveguides are in the same scale and aligned. The positions, where light is propagates, are shown.

Measurements

TM mode. Fiber-to-fiber transmission as function of wavelength. Oscillations: 3.0 nm

TE mode. Fiber-to-fiber transmission as function of wavelength. Oscillations 2.1 nm

TM mode. Fiber-to-fiber transmission as function of wavelength. Facet-to-facet oscillations: 0.25 nm

TE mode. Fiber-to-fiber transmission as function of wavelength. Facet-to-facet oscillations: 0.25 nm

Dr. Vadym Zayets

v.zayets(at)gmail.com

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Introduction

AlGaAs waveguide (800 nm)

AlGaAs waveguide integrated with Fe/MgO plasmonic waveguide(wavelength=1550 nm)

AlGaAs waveguide were fabricated first, only stepper was used. Double-dielectric. Thin MgO.

Fabrication technology.

Monolithical Integration

Measurements

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