My Research and Inventions

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Introduction

Si nanowire fabrication technology

fiber/waveguide coupling setup

devices made of Si-waveguides

directional coupler

integration: plasmonic + Si waveguides

two technology of integration

Out-plane plasmonic confinement

plasmonic isolator

III-V plasmonic

AlGaAs waveguide (800 nm)

AlGaAs waveguide (1550 nm)

Si wire waveguide (1550 nm)

plasmonic on GaAs (800 nm)

plasmonic on GaAs (1550 nm)

plasmonic on Si (1550 nm)

plasmons in metal strip

in-plane confinement of plasmons

samples very old

 

 
Sample: D61

AlGaAs waveguide integrated with Co plasmonic waveguide(wavelength=800 nm)

Plasmonic waveguide were fabricated first, electronic lithography (EB) was used. Problem with dielectric waveguides (BCl dry etching)

 

Fabrication technology.

MBE growth on 2010 12

 

Plasmonic waveguide

sputter (SiO2 (6nm;100w, 3’20”) →Co( 70-85nm?; 30min; 200W;Ar 43sccm;0.7Pa )→ Au(200nm;100W;13min)) jetliftoff

sputter (SiO2: 100nm; 200W ) jetliftoff (nozzle 28mm) ICP@bcr (#6; AlGaAs: 215nm; 2’30”; 150w/50w; 1Pa)

sputter (SiO2: 100nm; 200w; 28min)

 

 

I

Waveguide technology

 

There was a problem of waveguide fabrication. BCl etching rate of SiO2 was unexpectedly fast.

 

 

cross-sectional SEM of AlGaAs waveguide. 2012 10 31.

 

 

Monolithical Integration

 

 

Top SEM view of integrated AlGaAs waveguide and Co/Au plasmonic waveguides. 2012 10 17.

 

 

 

 

 

 

 

 

Top SEM view of spot size converter and ring resonator. 2012 10 17.

 

 

 

 

 

 

 

Measurements

 

 

 

I truly appreciate your comments, feedbacks and questions

I will try to answer your questions as soon as possible

 

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